Score : 800 points

Problem Statement

The beauty of a sequence a of length n is defined as a_1 \oplus \cdots \oplus a_n, where \oplus denotes the bitwise exclusive or (XOR).

You are given a sequence A of length N. Snuke will insert zero or more partitions in A to divide it into some number of non-empty contiguous subsequences.

There are 2^{N-1} possible ways to insert partitions. How many of them divide A into sequences whose beauties are all equal? Find this count modulo 10^{9}+7.

Constraints

All values in input are integers.
1 \leq N \leq 5 \times 10^5
0 \leq A_i < 2^{20}

Input

Input is given from Standard Input in the following format:

N
A_1 A_2 \ldots A_{N}

Output

Print the answer.

Sample Input 1

3
1 2 3

Sample Output 1

Four ways of dividing A shown below satisfy the condition. The condition is not satisfied only if A is divided into (1),(2),(3).

(1,2,3)
(1),(2,3)
(1,2),(3)

Sample Input 2

3
1 2 2

Sample Output 2

Sample Input 3

32
0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0

Sample Output 3

147483634

Find the count modulo 10^{9}+7.

Sample Input 4

24
1 2 5 3 3 6 1 1 8 8 0 3 3 4 6 6 4 0 7 2 5 4 6 2